The hottest Schott launched a new type of photosen
2022-10-18- Detail
Schott launched a new photosensitive glass
testing machine in Japan. The German special glass manufacturer Schott will launch photosensitive glass "fouranii" in the Japanese market. This product can turn off the main motor source of the experiment, crystallize computers and printers under ultraviolet radiation, and can be used as a glass substrate in the field of Semiconductors and biotechnology
under UV irradiation, the glass itself will deteriorate due to the appearance of machines with similar external morphology, but it will crystallize (vitrified) and become photosensitive glass after heat treatment. There is no need to use photoresist, and only hydrofluoric acid can etch the crystallized part. Schott's new products are characterized by an etching selection ratio of 30:1 between glass and ceramic parts, which is easy to process
when using photoresist to etch ordinary glass, the etching will develop towards isotropy, so it is difficult to achieve high aspect ratio processing. The photosensitive glass is a part of selective etching crystallization. In principle, there is no limitation on the aspect ratio, so it can achieve 20 ~ 30 μ M micro pattern processing
UV with a wavelength of 320nm is recommended for exposure, and the "uv300" exposure device can be used. Although scanning with UV lasers takes time, masks are not required. Moreover, using the focus of the laser, the complex three-dimensional structures such as the tunnel structure (transverse hole) inside the glass substrate can also be realized, which can only be achieved by stacking glass when using the previous etching technology. In fact, at present, customers have targeted microfluidics for manufacturing, so it is expected to become a means of manufacturing MEMS without masks
new products can be supplied with a maximum size of 300mm (12 inches) in wafer form and 200mm square in flake form
in addition, Schott also exhibited photosensitive glass (glass ceramics) for creative household appliances and other products in Japan, as well as ultra-thin plate glass that has begun to be used in the cover plate of intelligent fingerprint sensor
23 ℃, the saturated water absorption is only 0.5%
global glass () Department
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